Impact of Radial defect clustering on 3D stacked IC yield from wafer to wafer stacking.
Eshan SinghPublished in: ITC (2012)
Keyphrases
- integrated circuit
- semiconductor manufacturing
- k means
- clustering algorithm
- clustering method
- hierarchical clustering
- defect detection
- unsupervised clustering
- massively parallel
- self organizing maps
- cluster analysis
- similarity function
- spectral clustering
- genetic algorithm
- outlier detection
- combining multiple
- unsupervised learning
- training data
- information systems
- high impact
- search engine