A silicon-on-glass Z-axis accelerometer with vertical sensing comb capacitors.

Jiankun Wang Zhenchuan Yang Guizhen Yan

Published in: NEMS (2012)

Keyphrases

space charge
high density
activity recognition
sensor networks
cross section
low cost
electric field
real time
sensor fusion
integrated circuit
gesture recognition
high speed
daily activities
inertial sensors
spectrum sensing
silicon dioxide
environmental information
gallium arsenide