Login / Signup

A simple method for determining the coefficients of thermal expansion of polysilicon thin films by using resonance frequency measurements.

Hai-Yun Liu
Published in: IEEE SENSORS (2016)
Keyphrases
  • thin film
  • room temperature
  • random access memory
  • short circuit
  • high density
  • grain size
  • wavelet coefficients
  • multi layer
  • design considerations
  • chemical vapor deposition
  • databases
  • high temperature