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Impact of HALO structure on threshold voltage and leakage current in 45nm NMOS device.

Fauziyah SalehuddinIbrahim AhmadFazrena Azlee HamidAzami Zaharim
Published in: APCCAS (2010)
Keyphrases
  • leakage current
  • low voltage
  • power system
  • electrical properties
  • silicon dioxide