Effect of the membrane flatness defect on the offset voltage of a silicon piezoresistive pressure sensor.

Zohir Dibi Ali Boukabache Patrick Pons

Published in: ICECS (2003)

Keyphrases

silicon dioxide
real time
sensor data
liquid crystal
low cost
power system
high density
field effect transistors
high voltage
charge coupled device
data sets
video sequences
high speed
sensor fusion
high sensitivity