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Low-PBTS defect-engineered high-mobility metal-oxide BEOL transistors.

Bastien BeltrandoBruno CoppolelliJung-Bae KimYang Ho BaeStephen WeeksLisa EnmanGhazal SaheliDavide CornigliStuart BrinkleyMark SalyLuca LarcherDong Kil YimMilan Pesic
Published in: IRPS (2024)
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