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Fabrication of Titanium-Based Hard Coatings by Atmospheric Microplasma-Metal Organic Chemical Vapor Deposition Using Titanium Tetraisopropoxide.

Tsunehisa SuzukiMutsuto KatoYoshiki Shimizu
Published in: Int. J. Autom. Technol. (2013)
Keyphrases
  • chemical vapor deposition
  • high density
  • thin film
  • artificial intelligence
  • grain size
  • neural network
  • multiscale
  • evolutionary algorithm
  • low cost
  • plasma etching