A compact closed-loop nanomanipulation system in scanning electron microscope.
Yan Liang ZhangYong ZhangChanghai RuPatrick WooMitsuhiro NakamuraDavid HoyleIan CottonYu SunPublished in: ICRA (2011)
Keyphrases
- closed loop
- scanning electron microscope
- open loop
- control system
- control scheme
- feedback control
- control law
- parameter identification
- pid controller
- feedback controller
- trajectory tracking
- control algorithm
- asymptotic stability
- force control
- neural network
- control loop
- disturbance rejection
- external disturbances
- guaranteed cost