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Dynamic modeling and input shaping of thermal bimorph MEMS actuators.

Dan O. PopaByoung Hun KangJohn T. WenHarry E. StephanouGeorge SkidmoreAaron Geisberger
Published in: ICRA (2003)
Keyphrases
  • dynamically changing
  • data sets
  • artificial intelligence
  • control system
  • data structure
  • dynamic environments
  • degrees of freedom
  • changing environment