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Non-monolithic fabrication of thin-film microelectrode arrays on PMUT transducers as a bimodal neuroscientific investigation tool.

Andrada I. VeleaJoshua WilsonAstrid GollhardtCyril Baby KaruthedathAbhilash S. ThanniyilVasiliki Giagka
Published in: EMBC (2023)
Keyphrases
  • thin film
  • high density
  • plasma etching
  • multi layer
  • chemical vapor deposition
  • short circuit
  • grain size
  • integrated circuit
  • finite automata
  • solar cell
  • database
  • neural network
  • lessons learned
  • white light interferometry