thin films.

Miguel Grizalez E. Martinez J. Caicedo Jesús Heiras P. Prieto

Published in: Microelectron. J. (2008)

Keyphrases

thin film
high density
grain size
short circuit
plasma etching
solar cell
white light interferometry
three dimensional
room temperature
film thickness
wireless sensor networks
spatial distribution
chemical vapor deposition
silicon nitride