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First Observation of Ultra-high Polarization (~ 108 μC/cm²) in Nanometer Scaled High Performance Ferroelectric HZO Capacitors with Mo Electrodes.

F. HuangB. SainiL. WanH. LuX. HeS. QinW. TsaiA. GruvermanAndrew C. MengH.-S. Philip WongP. C. McIntyreS. S. Wong
Published in: VLSI Technology and Circuits (2023)
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