First Observation of Ultra-high Polarization (~ 108 μC/cm²) in Nanometer Scaled High Performance Ferroelectric HZO Capacitors with Mo Electrodes.
F. HuangB. SainiL. WanH. LuX. HeS. QinW. TsaiA. GruvermanAndrew C. MengH.-S. Philip WongP. C. McIntyreS. S. WongPublished in: VLSI Technology and Circuits (2023)
Keyphrases
- ultra high
- high resolution
- multi objective
- data handling
- high density
- integrated circuit
- differential evolution
- electron microscopy
- multiple objectives
- optimization algorithm
- scientific computing
- data intensive
- database
- single image
- data processing
- signal processing
- social networks
- artificial intelligence
- information retrieval
- data sets