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Fault Detection in the Semiconductor Etch Process Using the Seasonal Autoregressive Integrated Moving Average Modeling.

Muhammad Zeeshan ArshadJaveria Muhammad NawazSang Jeen Hong
Published in: J. Inf. Process. Syst. (2014)
Keyphrases
  • fault detection
  • industrial processes
  • fault diagnosis
  • power plant
  • fault localization
  • machine learning
  • long term