Improving automated visual fault inspection for semiconductor manufacturing using a hybrid multistage system of deep neural networks.
Tobias SchlosserMichael FriedrichFrederik BeuthDanny KowerkoPublished in: J. Intell. Manuf. (2022)
Keyphrases
- multistage
- semiconductor manufacturing
- production system
- neural network
- fault diagnosis
- discrete event simulation
- stochastic programming
- single stage
- process control
- dynamic programming
- lot sizing
- stochastic optimization
- fuzzy logic
- artificial neural networks
- optimal policy
- fault detection
- back propagation
- capacity expansion
- lot streaming
- fuzzy systems
- visual features
- real time