Simulation of silicon semiconductor processing.
Peter PichlerHeiner RysselPublished in: Eur. Trans. Telecommun. (1990)
Keyphrases
- gallium arsenide
- silicon dioxide
- plasma etching
- semiconductor devices
- information processing
- field effect transistors
- real time
- simulation study
- semiconductor manufacturing
- processing capabilities
- simulation environment
- simulation model
- mathematical model
- data processing
- control system
- e learning
- decision making
- data mining
- data sets