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IR confocal laser microscopy for MEMS Technological Evaluation.
Djemel Lellouchi
Felix Beaudoin
Christophe Le Touze
Philippe Perdu
Romain Desplats
Published in:
Microelectron. Reliab. (2002)
Keyphrases
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information retrieval
ir evaluation
evaluation framework
evaluation measures
xml retrieval
relevance assessments
interactive information retrieval
three dimensional
high resolution
probabilistic model
x ray
query expansion
image enhancement
evaluation method
evaluation metrics
evaluation process
real time