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An adaptive Copula function-based framework for fault detection in semiconductor wafer fabrication.

Hongwei XuWei QinYan-Ning SunYoulong LvJie Zhang
Published in: Comput. Ind. Eng. (2024)
Keyphrases
  • fault detection
  • wafer fabrication
  • fault diagnosis
  • constraint satisfaction
  • real time
  • artificial intelligence
  • industrial processes
  • fault identification
  • fuel cell