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films containing Si nanocrystals directly suitable for transmission electron microscopy.
S. Novikov
J. Sinkkonen
Timur Nikitin
L. Khriachtchev
M. Räsänen
E. Haimi
Published in:
Microelectron. J. (2008)
Keyphrases
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transmission electron microscopy
x ray
metal oxide
high resolution
chemical vapor deposition
database
neural network
electron microscopy
thin film transistor
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