A Fast Mask Manufacturability and Process Variation Aware OPC Algorithm with Exploiting a Novel Intensity Estimation Model.
Ahmed AwadAtsushi TakahashiChikaaki KodamaPublished in: IEICE Trans. Fundam. Electron. Commun. Comput. Sci. (2016)
Keyphrases
- estimation algorithm
- mathematical model
- probabilistic model
- theoretical analysis
- cost function
- objective function
- algorithm employs
- final result
- em algorithm
- optimization model
- selection algorithm
- tree structure
- optimization process
- kalman filter
- detection algorithm
- parameter estimation
- computational complexity
- correlation function
- recognition algorithm
- expectation maximization
- closed form
- process model
- input data
- iterative process
- similarity measure
- classification algorithm
- particle swarm optimization
- conceptual model
- model fitting
- segmentation algorithm
- parametric models
- search space
- k means
- estimation process
- map estimation
- preprocessing
- convergence rate
- bayesian framework
- prior information
- optimization method
- optimization algorithm
- monte carlo simulation
- dynamic programming
- density estimation
- worst case
- medical images
- optimal solution
- particle filter