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High quality gate insulator film formation on SiC using by microwave-excited high-density plasma.
Koutarou Tanaka
Hiroaki Tanaka
Akinobu Teramoto
Shigetoshi Sugawa
Tadahiro Ohmi
Published in:
Microelectron. Reliab. (2007)
Keyphrases
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high density
high quality
magnetic recording
low density
thin film
close proximity
chemical vapor deposition
data center
high bandwidth
high power
image quality
magnetic tape
super resolution
real time
high resolution
plasma etching
metal oxide semiconductor
field effect transistors