Frame vibration suppression for wafer transfer system.
Yanjie LiuMingyue WuGuobao XuLining SunPublished in: URAI (2011)
Keyphrases
- semiconductor manufacturing
- integrated circuit
- massively parallel
- neural network
- frame rate
- video frames
- edge detection
- database
- key frames
- video sequences
- coordinate frame
- fuzzy logic
- wavelet transform
- high speed
- text classification
- fault diagnosis
- expert systems
- knowledge transfer
- cross domain
- feature extraction
- decision trees