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Significance of the substrate temperature on the physical properties of RF sputtered Sb2Te3 thin films.

N. E. Vázquez-BarragánJose Santos-CruzC. E. Pérez-GarcíaSandra Andrea Mayén-HernándezM. Meléndez-LiraFrancisco Javier De Moure-Flores
Published in: CCE (2023)
Keyphrases
  • thin film
  • film thickness
  • room temperature
  • chemical vapor deposition
  • high density
  • neural network
  • grain size
  • electrical properties
  • physical laws
  • rf sputtered
  • databases
  • white light interferometry