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Electrical and Tribological Characteristics of Metal-Doped Carbon Thin Films.
Shigeru Umemura
Shinsuke Misu-Matsuhashi
Shigeru Hirono
Published in:
IEICE Trans. Electron. (2007)
Keyphrases
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thin film
grain size
short circuit
room temperature
chemical vapor deposition
high density
spatial distribution
physical characteristics
color images
silicon nitride
database
neural network
artificial neural networks