E-Beam Lithography Character and Stencil Co-Optimization.
Wai-Kei MakChris ChuPublished in: IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. (2014)
Keyphrases
- electron beam
- optimization algorithm
- optimization problems
- global optimization
- optimization process
- constrained optimization
- electron beam lithography
- optimization strategies
- optimization method
- combinatorial optimization
- data sets
- neural network
- bayesian networks
- cost function
- query optimization
- differential evolution