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Backside E-Beam Probing on Nano scale devices.

Rudolf SchlangenReiner LeihkaufUwe KerstChristian BoitRajesh JainTahir MalikKeneth R. WilsherTed R. LundquistBernd Krüger
Published in: ITC (2007)
Keyphrases
  • nano scale
  • mobile devices
  • real time
  • smart phones
  • electron beam
  • image sequences
  • mobile applications
  • cross section
  • processing capabilities