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Statistical Modeling and Simulation of Threshold Variation Under Random Dopant Fluctuations and Line-Edge Roughness.

Yun YeFrank LiuMin ChenSani R. NassifYu Cao
Published in: IEEE Trans. Very Large Scale Integr. Syst. (2011)
Keyphrases
  • statistical modeling
  • statistical models
  • edge detection
  • statistical model
  • predictive modeling
  • multiscale
  • simulation model
  • line segments
  • simulation study
  • edge information
  • simulation models