Reactive Sputtering of Aluminum Nitride (002) Thin Films for Piezoelectric Applications: A Review.

Abid Iqbal Faisal Mohd-Yasin

Published in: Sensors (2018)

Keyphrases

thin film
film thickness
high density
multi layer
magnetic field
grain size
short circuit
chemical vapor deposition
white light interferometry
solar cell
room temperature
high voltage
plasma etching
silicon nitride
agent architecture
genetic algorithm
neural network
database