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The Influence of Electrode on Elastic Constant $C_{33}{}^{D}$ Extraction of Scandium-doped Aluminum Nitride Thin Film by Thickness-extensional Mode FBAR.
Xia Hu
Ouyang Su
Lifeng Qin
Published in:
NEMS (2021)
Keyphrases
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room temperature
film thickness
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short circuit
electron microscopy
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