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A study of deposition conditions on charging properties of PECVD silicon nitride films for MEMS capacitive switches.
Matroni Koutsoureli
Loukas Michalas
Anestis Gantis
George J. Papaioannou
Published in:
Microelectron. Reliab. (2014)
Keyphrases
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electrical properties
real time
artificial intelligence
chemical vapor deposition
sufficient conditions
statistical analysis
experimental study
multimedia
case study
empirical studies
theoretical framework
structural properties
desirable properties
thin film