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Parallel Beam Micro Sensor/Actuator Unit Using PZT Thin Films and its Application Examples.
Toshio Fukuda
Hiroshi Sato
Fumihito Arai
Hitoshi Iwata
Kouichi Itoigawa
Published in:
ICRA (1998)
Keyphrases
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thin film
parallel processing
short circuit
processing units
multi layer
high density
grain size
shared memory
white light interferometry
genetic algorithm
sensor networks
real time
multi sensor
parallel computing
closed loop
semi supervised
wireless sensor networks
query processing
databases