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Single band electronic conduction in hafnium oxide prepared by atomic layer deposition.

Sergey ShaimeevVladimir GritsenkoKaupo KukliHei WongEun-Hong LeeChungwoo Kim
Published in: Microelectron. Reliab. (2007)
Keyphrases
  • electrical properties
  • application layer
  • silicon dioxide
  • neural network
  • multi layer
  • silicon nitride
  • information retrieval
  • genetic algorithm
  • website
  • thin film
  • field effect transistors
  • metal oxide