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Single band electronic conduction in hafnium oxide prepared by atomic layer deposition.
Sergey Shaimeev
Vladimir Gritsenko
Kaupo Kukli
Hei Wong
Eun-Hong Lee
Chungwoo Kim
Published in:
Microelectron. Reliab. (2007)
Keyphrases
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electrical properties
application layer
silicon dioxide
neural network
multi layer
silicon nitride
information retrieval
genetic algorithm
website
thin film
field effect transistors
metal oxide