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Influence of sputtering power on properties of ZnO thin films fabricated by RF sputtering in room temperature.
Dedong Han
Yi Wang
Shengdong Zhang
Lei Sun
Ruqi Han
Satoru Matsumoto
Yuji Ino
Published in:
Sci. China Inf. Sci. (2012)
Keyphrases
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thin film
room temperature
film thickness
thermal conductivity
high density
short circuit
high speed
grain size
multi layer
white light interferometry
chemical vapor deposition
solar cell
magnetic field
plasma etching
databases
power consumption
genetic algorithm
machine learning