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Strain status in ZnO film on sapphire substrate with a GaN buffer layer grown by metal-source vapor phase epitaxy.
J. P. Cui
Y. Duan
X. F. Wang
Y. P. Zeng
Published in:
Microelectron. J. (2008)
Keyphrases
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thin film
film thickness
grain size
magnetic recording
multi layer
high density
learning phase
chemical vapor deposition
multiple sources
motion picture
quasi static
diffusion process
fiber optic
room temperature
multiple layers
finite element analysis
neural network