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Thin Films Device for Phase Change Memory Applications.
Diptoshi Roy
Soniya Agrawal
G. Sreevidya Varma
Chandasree Das
Published in:
REV (2019)
Keyphrases
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thin film
high density
grain size
multi layer
short circuit
memory requirements
cost effective
room temperature
chemical vapor deposition
plasma etching
databases
semi supervised
data management
read write
low density