Comparison of thermoreflectance and scanning thermal microscopy for microelectronic device temperature variation imaging: Calibration and resolution issues.
Stéphane GraubyM. Amine SalhiLuis David Patiño LopezWilfrid ClaeysBenoît CharlotStefan DilhairePublished in: Microelectron. Reliab. (2008)
Keyphrases
- high resolution
- image analysis
- low resolution
- scanning devices
- data acquisition
- image processing
- thermal imaging
- high temperature
- room temperature
- surface temperature
- infrared
- super resolution
- resolution enhancement
- thermal conductivity
- small animal
- camera calibration
- fluorescence microscopy
- scan data
- computer vision
- air temperature
- thermal infrared
- clinical applications
- high dynamic range
- thin film
- field of view
- high throughput
- image registration
- multi view