Effects of deposition pressure on the microstructural and optoelectrical properties of B-doped hydrogenated nanocrystalline silicon (nc-Si: H) thin films grown by hot-wire chemical vapor deposition.
Peiqing LuoZhibin ZhouYoujie LiShuquan LinXiaoming DouRongqiang CuiPublished in: Microelectron. J. (2008)