Lossy Mode Resonance Sensors based on Tungsten Oxide Thin Films.
Ignacio Del VillarDina L. BohorquezDomenico CaputoAlessio BuzzinFrancesco ChiavaioliFrancesco BaldiniCarlos R. ZamarreñoIgnacio R. MatíasPublished in: IEEE SENSORS (2020)
Keyphrases
- thin film
- electron microscopy
- room temperature
- silicon nitride
- high density
- sensor networks
- sensor data
- real time
- short circuit
- grain size
- data compression
- multi layer
- data fusion
- multi sensor
- solar cell
- film thickness
- plasma etching
- neural network
- database
- image sensor
- feed forward
- cloud computing
- white light interferometry