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Improvement of Adhesion Strength of Fluoropolymer Thin Films by Vapor Deposition Polymerization.
Kazuo Senda
Tsuyoshi Matsuda
Kuniaki Tanaka
Hiroaki Usui
Published in:
IEICE Trans. Electron. (2013)
Keyphrases
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thin film
high density
multi layer
chemical vapor deposition
grain size
plasma etching
film thickness
machine learning
diffusion process
solar cell
neural network
learning algorithm
significant improvement
high frequency
room temperature