Determination of the trap states distribution in Poly-Si films using the OEMS modulation.

Xiyue Li Wanling Deng Junkai Huang

Published in: ASICON (2011)

Keyphrases

metal oxide
spatial distribution
transition probabilities
grain size
chemical vapor deposition
high density
uniformly distributed
power law
real time
data sets
probability distribution
x ray
data distribution
film restoration