Technology Mapping Technique for Increasing Throughput of Character Projection Lithography.
Makoto SugiharaKenta NakamuraYusuke MatsunagaKazuaki J. MurakamiPublished in: IEICE Trans. Electron. (2007)
Keyphrases
- electron beam lithography
- key technologies
- cost effective
- case study
- data processing
- projection method
- technological advances
- st century
- computer systems
- higher throughput
- rapid development
- personal computer
- data sets
- response time
- wireless sensor networks
- web services
- metadata
- artificial intelligence
- data mining
- real world