A Tellurium Oxide Microcavity Resonator Sensor Integrated On-Chip with a Silicon Waveguide.
Henry C. FrankisDaniel SuDawson B. BonnevilleJonathan D. B. BradleyPublished in: Sensors (2018)
Keyphrases
- waveguide
- high speed
- high density
- low cost
- electro optic
- silicon dioxide
- si sio
- high data rate
- transmission electron microscopy
- real time
- field effect transistors
- image sensor
- low power
- cmos image sensor
- sensor data
- chip design
- sensor networks
- cmos technology
- multi sensor
- circuit design
- metal oxide semiconductor
- programmable logic
- millimeter wave
- parallel processing
- x ray
- high resolution