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Electrical and Mechanical Characteristics of Au-, Pt-, and Pd-Doped Carbon Thin Films.
Mitsunori Yabe
Shigeru Umemura
Shigeru Hirono
Published in:
IEICE Trans. Electron. (2010)
Keyphrases
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thin film
short circuit
room temperature
high density
grain size
electro mechanical
multi layer
transmission line
physical characteristics
chemical vapor deposition
electrical power
white light interferometry