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Electrical and Mechanical Characteristics of Au-, Pt-, and Pd-Doped Carbon Thin Films.

Mitsunori YabeShigeru UmemuraShigeru Hirono
Published in: IEICE Trans. Electron. (2010)
Keyphrases
  • thin film
  • short circuit
  • room temperature
  • high density
  • grain size
  • electro mechanical
  • multi layer
  • transmission line
  • physical characteristics
  • chemical vapor deposition
  • electrical power
  • white light interferometry