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Backside spectroscopic photon emission microscopy using intensified silicon CCD.
Arkadiusz Glowacki
Christian Boit
Philippe Perdu
Yoshitaka Iwaki
Published in:
Microelectron. Reliab. (2014)
Keyphrases
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charge coupled device
photon counting
three dimensional
multispectral
integral imaging
digital camera
high speed
ccd camera
energy saving
real time
data sets
neural network
high quality
image analysis
image sensor