Login / Signup

Electrical properties of zinc oxide sputtered thin films.

R. Ondo-NdongG. FerblantierFrédérique Pascal-DelannoyAlexandre BoyerA. Foucaran
Published in: Microelectron. J. (2003)
Keyphrases
  • electrical properties
  • silicon nitride
  • film thickness
  • thin film
  • leakage current
  • high speed
  • electron microscopy