Thin film bulk acoustic resonators based on c-axis tilted yttrium-doped AlN for Viscosity sensors.

Fares Kanouni Amara Saad Farouk Laidoudi

Published in: SSD (2022)

Keyphrases

thin film
room temperature
sensor fusion
high density
short circuit
sensor data
sensor networks
grain size
solar cell
multi layer
electron microscopy
computer conferencing
power plant
multi sensor
differential equations
wireless sensor networks
plasma etching