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Large-Scale Optical Phased Array Based on a Multi-Layer Silicon-Nitride-on-Silicon Photonic Platform.
Liangjun Lu
Weihan Xu
Yuyao Guo
Chuxin Liu
Jianping Chen
Linjie Zhou
Published in:
OFC (2024)
Keyphrases
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multi layer
phased array
thin film
silicon dioxide
neural network
neural nets
liquid crystal
silicon nitride
high density
low cost
scan data
artificial intelligence
feature selection
decision making
high temperature
electrical properties