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Plasma half dicing based on micro-loading effect for ultra-thin LiNbO3 plate wave devices on Si substrate.
Yoshimi Yunoki
Michio Kadota
Masaaki Moriyama
Shuji Tanaka
Published in:
NEMS (2016)
Keyphrases
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chemical vapor deposition
high speed
mobile devices
high density
electronic devices
neural network
search engine
high energy
plasma etching