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Yoshimi Yunoki
Publication Activity (10 Years)
Years Active: 2016-2016
Publications (10 Years): 1
Top Topics
Electronic Devices
High Energy
Plasma Etching
Top Venues
NEMS
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Publications
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Yoshimi Yunoki
,
Michio Kadota
,
Masaaki Moriyama
,
Shuji Tanaka
Plasma half dicing based on micro-loading effect for ultra-thin LiNbO3 plate wave devices on Si substrate.
NEMS
(2016)