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Electrical characterization of integrated passive devices using thin film technology for 3D integration.
Xin Sun
Yunhui Zhu
Zhen Hua Liu
Qing-hu Cui
Shenglin Ma
Jing Chen
Min Miao
Yufeng Jin
Published in:
J. Zhejiang Univ. Sci. C (2013)
Keyphrases
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thin film
solar cell
short circuit
chance discovery
personal computer
electronic devices
cost effective
high density
electron microscopy
grain size
multi layer
consumer electronics
mobile devices
rfid reader
wearable devices