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Effect of ions presence in the SiOCH inter metal dielectric structure.

Benjamin RebuffatVincenzo Della MarcaPascal MassonJean-Luc OgierMarc MantelliOlivier PauletLaurent LopezRomain Laffont
Published in: ESSDERC (2013)
Keyphrases
  • structural properties
  • structural information
  • learning algorithm
  • image processing
  • clustering algorithm
  • decision trees
  • multiscale
  • graph structure